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SPIE Digital Library - J.Micro/Nanolithography, MEMS, and MOEMS
Title: SPIE Digital Library - J.Micro/Nanolithography, MEMS, and MOEMS
Type: Index
Description: The SPIE Digital Library is the most extensive resource available on optics and photonics, providing unprecedented access to more than 200,000 technical papers from SPIE Journals and Conference Proceedings from 1990 to the present. More than 17,000 new technical papers are added annually.
Publisher: International Society for Optical Engineering (SPIE)
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